15

Defect Engineering for ULSI Epitaxial Silicon

Year:
1989
Language:
english
File:
PDF, 951 KB
english, 1989
17

CoSi2 Formation Through Co/Ti Multilayer Reacting with Si-(100) Substrate

Year:
1991
Language:
english
File:
PDF, 2.69 MB
english, 1991
28

Oxygen and Carbon Precipitation in Crystalline Sheet Silicon

Year:
2006
Language:
english
File:
PDF, 335 KB
english, 2006
32

Iron diffusivity in silicon: Impact of charge state

Year:
1995
Language:
english
File:
PDF, 274 KB
english, 1995